Products and Solutions

MEMS Scanners

Si MEMS mirror chip
Packaged MEMS scanner
Sensor-embedded scanner
Sensor output in green
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MEMS scanners

One-axis MEMS Scanners

Types Resonant Quasi-static
Model # RS1_xxyyS0 RS1_3533S3 RS1_3525S3 RS1_1785S1 qS1-5018bS3
Features Actuation electrostatic electrostatic electrostatic electrostatic electrostatic
Features no optional optional optional optional
Specification Mirror shape circular elliptic elliptic elliptic elliptic
Mirror size (dia.) 1 ~ 6 mm 3.5 / 5.8 mm 3.5 / 5.8 mm 1.7 / 2.4 mm 5.0 / 3.5 mm
Frequency 1 ~ 5 kHz 3.2 ~ 3.4 kHz 2.4 ~ 2.6 kHz 8 ~ 9 kHz 50 ~ 120 Hz
DSA (optical scan angle) 10 ~ 35 deg > 25 deg > 30 deg > 35 deg > 18 deg
Input Voltage 60 ~ 150 V 60 ~ 150 V 60 ~ 150 V 60 ~ 150 V 90 ~ 150 V
Packaging ARC window optional optional optional optional optional
connector 10 pins 10 or 20 pins 10 or 20 pins 10 or 20 pins 10 or 20 pins
Applications (recommended) LIDAR fast-axis LIDAR fast-axis LIDAR fast-axis LIDAR fast-axis LIDAR slow-axis
Remarks · stability > 0.005°C · stability > 0.005°C · stability > 0.001°C · sense electrodes available · sense electrodes available

Note

· Customized scanners can be delivered within 3~6 months.

· Performance of each scanner can be improved by calibration.

· Magnetic / piezoelectric scan can be combined upon request.

· Consulting on scanning solution and evaluation are available.

· The specifications are subject to change without prior notice.

Two-axis MEMS Scanners

Types (custom design) Quasi-static Quasi-static/Resonant
Model # QS2-1018US3 QS2-2015US3 QS2-4410US3 QR2-1035US4 QR2-2035US4
Features Actuation electrostatic electrostatic electrostatic electrostatic electrostatic
Embedded sensor optional optional optional optional optional
Specification Mirror shape circular circular elliptic elliptic circular
Mirror size (dia.) ~ 1 mm ~ 2 mm 4.4 / 4.7 mm 1 / 0.7 mm 2 mm
Slow (x) frequency 50 ~ 120 Hz 50 ~ 120 Hz 50 ~ 120 Hz 0 ~ 60 Hz 0 ~ 60 Hz
Fast (x) frequency " " " 30 ~ 33 kHz 8 ~ 10 kHz
Slow (x) OSA > 18 deg > 15 deg > 10 deg 10 ~ 15 deg 12 ~ 18 deg
Fast (x) OSA " " " 30 ~ 40 deg 25 ~ 35 deg
Input Voltage 90 ~ 150 V 90 ~ 150 V 90 ~ 150 V 80 ~ 160 V 80 ~ 160 V
Packaging ARC window optional optional optional optional optional
connector 10 or 20 pins 10 or 20 pins 10 or 20 pins 10 pins (FPCB) 10 pins (FPCB)
Applications (recommended) general reserch optical imaging optical imaging AR display LiDAR
Remarks · stability < 0.005°C · stability < 0.005°C · stability < 0.001°C · sense electrodes available · sense electrodes available

Note

· Customized scanners can be delivered within 3~6 months.

· Performance of each scanner can be improved by calibration.

· Magnetic / piezoelectric scan can be combined upon request.

· Consulting on scanning solution and evaluation are available.

· The specifications are subject to change without prior notice.