Products and Solutions

MEMS Scanners

Si-based MEMS scanner

MEMS scanners

Sensing waveform of resonant MEMS scanner

Spec sheet Download
(in preparation)

Sensing waveform of quasi-static MEMS scanner

Spec sheet Download
(in preparation)

Resonant Si-based MEMS 1D scanner

Product# RS1_xx33P RS1_xx25PS1 RS1_xx25PS2 RS1_xx25PS3
Function Si mirror rotates with input volatege magnitude & phase detecion of Si mirror phase detecion of Si mirror magnitude & phase detecion of Si mirror
Application Laser beam seering for LiDAR
Features Actuation Electrostatic
Gimbald x x x x
Sensing x o o o
Packaged Optical or Hermetic sealing package Optical package
Specification Mirror size 1 mm ~ 6 mm (Circular) 5.8 * 3.5 mm2 5.8 * 3.5 mm2 5.8 * 3.5 mm2
Frequency 1 ~ 5 kHz 3.3 kHz 2.5 kHz 2.5 kHz
Optical Scan Angle (OSA) 10 ~ 35 deg. 25 deg. 30 deg. 30 deg.
Input Voltage 100 ~ 150 V
Power consumption <20 mA

Quasi-static 1D MEMS scanner

Product# QS1_xx35PS3
Function
Application OCT
Features Actuation Electrostatic
Gimbald x
Sensing o
Packaged o
Specification Mirror size 5 * 3.5 mm2
Frequency 50 ~ 120 Hz
Optical Scan Angle (OSA) 18 deg.
Input Voltage 135 V
Power consumption <20 mA

Quasi-static 2D MEMS scanner

Product# QS2_xx35P QR2_xx35P
Function
Application Display
Features Actuation Electrostatic Electrostatic
Gimbald x o
Sensing o o
Packaged o o
Specification Mirror size 1 ~ 3 mm (Circular) 1 * 0.7 mm2
Frequency 50 ~ 120 Hz Slow axis 60 Hz
Fast axis 32 kHz
Optical Scan Angle (OSA) 10 deg. Slow axis 10 deg.
Fast axis 30 deg.
Input Voltage 140 V 140 V
Power consumption <20 mA <20 mA