WeMEMS | Products and Solutions | MEMS Scanners

MEMS Scanners

Product Brochure (PDF) Sensor Performance_phase diagram (PDF)

Resonant: one-axis scanner

Quasistatic: one-axis scanner

Single-chip: two-axis scanner

Folded: Two-axis scanner

One-axis MEMS Scanners

Types		Resonant
Model #		RS1ELC-35I011	RS1ELC-35I021	RS1ELC-35I029	RS1ELC-54I040	RS1ELC-25I068
Features	Actuation	electrostatic	electrostatic	electrostatic	electrostatic	electrostatic
Features	Embedded sensor	Yes	Yes	Yes	Yes	Yes
Specifications	Mirror shape	Elliptic	Elliptic	Elliptic	circular	Elliptic
	Mirror size (dia.)	3.5 / 5.5 mm	3.5 / 5.5 mm	3.5 / 5.8 mm	5.4 mm	2.5 / 1.8 mm
	Frequency	1.1 kHz	2.1 kHz	2.9 kHz	4.0 kHz	6.8 kHz
	OSA (optical scan angle)	> 25 deg.	> 25 deg.	> 30 deg.	> 12 deg.	35 deg.
	Input voltage	50 Vpp	110 Vpp	150 Vpp	160 Vpp	140 Vpp
Packaging	ARC window	Optional	Optional	Optional	Optional	Optional
Packaging	Connector	20 pins	20 pins	20 pins	20 pins	20 pins
Applications		LiDAR 3D robot vision	LiDAR 3D robot vision	LiDAR	LiDAR	LiDAR

Single-axis MEMS Scanners

Types		Resonant			Quasi-static
Model #		RS1ELC-24I090	RS1PLP-50I014	RS1PLP-30I034	QS1PLP-44I005	QS1PLX-55I017
Features	Actuation	piezoelectric	piezoelectric	piezoelectric	piezoelectric	piezoelectric
Features	Embedded sensor	Yes	Yes	Yes	Yes	No
Specifications	Mirror shape	Elliptic	circular	Elliptic	Elliptic	Elliptic
	Mirror size (dia.)	2.4 / 1.7 mm	5.0 mm	3.0 / 2.0 mm	4.4 / 3.1 mm	5.5 / 1.8 mm
	Frequency	9.0 kHz	1.4 kHz	3.4 kHz	0.5 ~ 150 Hz	0.5 ~ 150 Hz
	OSA (optical scan angle)	35 deg.	30 deg.	30 deg.	15 deg.	20 deg.
	Input voltage	150 Vpp	30 Vpp	4.2 Vpp	30 Vpp	13 Vpp
Packaging	ARC window	Optional	Optional	Optional	Optional	Optional
Packaging	Connector	20 pins	10 pins	10 pins	10 pins	10 pins
Applications		LiDAR	LiDAR 3D robot vision	LiDAR	Optical imaging	Optical imaging (step motion)

Two-axis MEMS Scanners

Types		Resonant			Quasi-static	Resonant
Model #		QR2EGX-20I090	QR2EGX-10I150	QR2PGX-15I073	QS2PLX-44I001	RS2PGP-20I066
Features	Actuation	electrostatic	electrostatic	piezoelectric	piezoelectric	piezoelectric
Features	Embedded sensor	Fast axis only	Fast axis only	Optional	No	Yes
Specifications	Mirror shape	Elliptic	circular	Elliptic	Elliptic	Elliptic
	Mirror size (dia.)	2.0 mm	1.0 / 0.7 mm	1.5 mm	4.4 mm	2.0 mm
	Slow (x) frequency	0 ~ 200 Hz	0 ~ 320 Hz	0 ~ 60 Hz	0 ~ 60 Hz	3.9 kHz
	Fast (y) frequency	9 kHz	15 kHz	7.3 kHz	0 ~ 60 Hz	6.6 kHz
	Slow (x) OSA	> 9 deg.	> 9 deg.	> 25 deg.	5.8 deg.	10 deg.
	Fast (y) OSA	> 8 deg.	> 10 deg.	> 15 deg.	5.8 deg.	10 deg.
	Input voltage	120 Vpp	100 Vpp	(x) 20 Vpp (y) 7 Vpp	16 Vpp	(x) 6 Vpp (y) 8Vpp
Packaging	ARC window	Optional	Optional	Optional	Optional	Optional
Packaging	Connector	FPCB / 10 pins	FPCB / 10 pins	20 pins	20 pins	20 pins
Applications		LiDAR HUD	Display HUD	Optical imaging	LiDAR Optical imaging	LiDAR Smart headlight