Si scanner chips
Spec sheet Download(in preparation)
Si MEMS mirror chip
Packaged MEMS scanner
Sensor-embedded scanner
Sensor output in green
· Customized scanners can be delivered within 3~6 months.
· Performance of each scanner can be improved by calibration.
· Magnetic / piezoelectric scan can be combined upon request.
· Consulting on scanning solution and evaluation are available.
· The specifications are subject to change without prior notice.
· IIS (iterative input shaping) in mass production
· Optimization of MEMS design for high performance
| Types | Resonant | Quasi-static | ||||
|---|---|---|---|---|---|---|
| Model # | RS1_xxyyS0 | RS1_3533S3 | RS1_3525S3 | RS1_1785S1 | qS1-5018bS3 | |
| Features | Actuation | electrostatic | electrostatic | electrostatic | electrostatic | electrostatic |
| Features | no | optional | optional | optional | optional | |
| Specification | Mirror shape | circular | elliptic | elliptic | elliptic | elliptic |
| Mirror size (dia.) | 1 ~ 6 mm | 3.5 / 5.8 mm | 3.5 / 5.8 mm | 1.7 / 2.4 mm | 5.0 / 3.5 mm | |
| Frequency | 1 ~ 5 kHz | 3.2 ~ 3.4 kHz | 2.4 ~ 2.6 kHz | 8 ~ 9 kHz | 50 ~ 120 Hz | |
| DSA (optical scan angle) | 10 ~ 35 deg | > 25 deg | > 30 deg | > 35 deg | > 18 deg | |
| Input Voltage | 60 ~ 150 V | 60 ~ 150 V | 60 ~ 150 V | 60 ~ 150 V | 90 ~ 150 V | |
| Packaging | ARC window | optional | optional | optional | optional | optional |
| connector | 10 pins | 10 or 20 pins | 10 or 20 pins | 10 or 20 pins | 10 or 20 pins | |
| Applications | (recommended) | LIDAR fast-axis | LIDAR fast-axis | LIDAR fast-axis | LIDAR fast-axis | LIDAR slow-axis |
| Remarks | · stability > 0.005°C | · stability > 0.005°C | · stability > 0.001°C | · sense electrodes available | · sense electrodes available | |
| Types (custom design) | Quasi-static | Quasi-static/Resonant | ||||
|---|---|---|---|---|---|---|
| Model # | QS2-1018US3 | QS2-2015US3 | QS2-4410US3 | QR2-1035US4 | QR2-2035US4 | |
| Features | Actuation | electrostatic | electrostatic | electrostatic | electrostatic | electrostatic |
| Embedded sensor | optional | optional | optional | optional | optional | |
| Specification | Mirror shape | circular | circular | elliptic | elliptic | circular |
| Mirror size (dia.) | ~ 1 mm | ~ 2 mm | 4.4 / 4.7 mm | 1 / 0.7 mm | 2 mm | |
| Slow (x) frequency | 50 ~ 120 Hz | 50 ~ 120 Hz | 50 ~ 120 Hz | 0 ~ 60 Hz | 0 ~ 60 Hz | |
| Fast (x) frequency | " | " | " | 30 ~ 33 kHz | 8 ~ 10 kHz | |
| Slow (x) OSA | > 18 deg | > 15 deg | > 10 deg | 10 ~ 15 deg | 12 ~ 18 deg | |
| Fast (x) OSA | " | " | " | 30 ~ 40 deg | 25 ~ 35 deg | |
| Input Voltage | 90 ~ 150 V | 90 ~ 150 V | 90 ~ 150 V | 80 ~ 160 V | 80 ~ 160 V | |
| Packaging | ARC window | optional | optional | optional | optional | optional |
| connector | 10 or 20 pins | 10 or 20 pins | 10 or 20 pins | 10 pins (FPCB) | 10 pins (FPCB) | |
| Applications | (recommended) | general reserch | optical imaging | optical imaging | AR display | LiDAR |
| Remarks | · stability < 0.005°C | · stability < 0.005°C | · stability < 0.001°C | · sense electrodes available | · sense electrodes available | |
